Fundamental Principles of Optical Lithography

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544 psl.

2007 m.

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Código de barras: 9780470727300
Descrição

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.