Nano- and Micro-Electromechanical Systems

Fundamentals of Nano- and Microengineering, Second Edition

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752 psl.

2005 m.

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Brūkšninis kodas: 9780849328381
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Introduces concepts, methods, techniques, and technologies that are needed to solve a wide variety of problems related to high-performance nano- and micro systems. This book builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices.