Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography
Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography by D. O. Filatov.
Published by Nova Science Pub. Inc., (2010), Paperback, 87 pages.
Topics: Industrial applications, Microlithography, Excimer lasers, Lithography.